Publications | For general applications and areas of interest, we have published results of our research and the corresponding feedback from customers. The publications provide an overall information for many of the fields where our technology and equipment are applied. | | The following publications are available in PDF format and can be displayed by means of the Acrobat Reader. Here you can download the current version. | |  | | | | |  | | New Approaches towards Dry Etching Controlled by in situ Interferometry Dr. W. John, L. Weixelbaum, Dr. H.Wittrich, J. Würfl, Ferdinand-Braun-Institut für Höchstfrequenztechnik Dr. G. Frankowski, GF Messtechnik GmbH (38 kB) | | | | |  | | Interferometric measuring device with 2D analyzing for real-time and in situ plasma etching in the production of microsystem components Dr. C. Westermann, Dr. M. Chen, Dr. G. Frankowski, GFMesstechnik GmbH Dr. W. John, Dr. H. Wittrich, Ferdinand-Braun-Institut für Höchstfrequenztechnik (FBH), (1.396 kB) | | | | |  | | IFast and Contactless Optical Measurement of the 3D Shape and the Surface Roughness by Projected Micro Fringes Dr. G. Frankowski, GFMesstechnik GmbH (760 kB) | | | | |  | | Real-time 3D Shape Measurement with Digital Stripe Projection by Texas Instruments Micromirror Devices DMD Dr. G. Frankowski, Dr. M. Chen, T. Huth, GFMesstechnik GmbH (1.224 kB) | | | | |  | | Optical Measurement of the 3D-Coordinates and the Combustion Chamber Volume of Engine Cylinder Heads Dr. G. Frankowski, Dr. M. Chen, T. Huth, GFMesstechnik GmbH (211 kB) | | | | |  | | Optical 3D Wear Measurement Dr. G. Frankowski, GFMesstechnik GmbH (273 kB) | | | | |  | | Fast Optical Measurement of the 3D Shape and the Complexion of the Human Skin Dr. G. Frankowski, GFMesstechnik GmbH (1.297 kB) | | | | |  | | Optical 3D in vivo Measurement of Human Skin Surfaces with PRIMOS Dr. G. Frankowski, GFMesstechnik GmbH (1.267 kB) | | | | |  | | Phaseshift rapid invivo measuring of human skin (PRIMOS) by digital fringe projection with micromirror display devices DMD Dr. G. Frankowski, Dr. M. Chen, T. Huth, GFMesstechnik GmbH (883 kB) | | | | |  | | Comparison of Replica- and In Vivo-Measurement of the Microtopography of Human Skin C. Hof, H. Hopermann, University of the Federal Armed Forces, Hamburg (216 kB) | | | | |  | | Optical 3D in vivo Measurement of Human Skin Surfaces with PRIMOS Dr. G. Frankowski, Dr. M. Chen, GFMesstechnik GmbH (580 kB) | | | | | | | |